Working Principle and Application of Manual Probe Table

Working Principle:

Manual probe table is widely used in the semiconductor industry, comprehensive and economical test equipment,wafer testing mainly used for semiconductor chip electrical parameter testing.

Manual probe table is through the two probes and the suction plate enough to become a circuit and the corresponding large-scale electrical parameter tester for the chip in the integrated circuit detection.

Scope of application:

Manual probe table is mainly used for the production and scientific research of integrated circuits, transistors, diodes, silicon controlled and sensitive components core voltage, current, resistance and other parameters for manual testing.

Extremely low temperature test.

Because wafers are tested in low temperature atmospheric environment, water vapor in the air will condense on the wafers,wafer probe which will lead to excessive leakage or the probes will not be able to contact the electrodes and make the test fail. Avoiding this requires pumping the water vapor out of the vacuum cavity before testing and keeping the pump running throughout the test.

High temperature non-oxidizing test:

When wafers are heated to temperatures of 300°C, 400°C, 500°C or even higher, oxidation becomes more and more apparent, and the higher the temperature the more severe the oxidation. Excessive oxidation can lead to electrical errors, physical and mechanical deformation of the wafer. Avoiding this requires pumping the oxygen out of the vacuum chamber before testing and keeping the pump running throughout the test.

During wafer testing the temperature changes between low and high temperatures, and because of thermal expansion and contraction,probe holder there is a relative displacement between the positioned probes and the device electrodes, which requires the repositioning of the needle holders, which are located outside the chamber. We also have the option of using a joystick-controlled automated needle holder to adjust the position of the probe.

Working Principle wafer probe atmospheric environment

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